EpiWare builds advanced process control software for MBE systems and semiconductor crystal growth equipment — turning complex epitaxy into reliable, repeatable science.
We develop software that crystal growers actually want to use — powerful enough for research, reliable enough for production.
EpiWare, LLC is a Baltimore-based software company specializing in control systems for semiconductor crystal growth equipment. Our software is designed from the ground up for MBE, CVD, and related deposition systems.
We understand the unique demands of epitaxial growth — where a fraction of a degree or a momentary flux deviation can determine the difference between a successful wafer run and a costly failure. Our tools give growers the precision, visibility, and automation they need.
From recipe development and execution to real-time parameter monitoring and post-growth analysis, EpiWare provides an integrated software environment that replaces fragmented legacy tools with a single, modern platform.
Sub-second communication with instruments via Modbus, serial, and Ethernet protocols.
C# recipe scripting with full access to machine parameters — no black boxes.
Safety interlocks, parameter bounds checking, and comprehensive audit logging.
Full historical data capture for every run, enabling post-growth analysis and optimization.
A complete software ecosystem for semiconductor equipment control, monitoring, and analysis.
The core platform for machine control and recipe execution. Connects to your instruments, runs growth recipes, and provides real-time process visualization.
Automated data acquisition and historical analysis. Every parameter, every second, every run — captured and queryable for post-growth optimization.
Visual machine configuration without code. Define your instruments, drivers, components, and IO mappings through an intuitive tree-based interface.
MachineStudio is the heart of EpiWare's ecosystem. Built on .NET with a modular architecture, it connects to virtually any instrument used in semiconductor crystal growth — from Eurotherm temperature controllers to custom beam flux monitors.
Whether you're upgrading a legacy MBE system or building a new lab, we'd like to hear from you.
EpiWare provides custom software solutions tailored to your specific equipment and process requirements. Reach out to discuss your needs — from single-machine installations to multi-system facility deployments.
610 Nicoll Ave
Baltimore, MD 21212
EpiWare, LLC
Baltimore, Maryland